Speaker: Dr. Behraad BahreyniÂ
Associate Professor
School of Mechatronic
Simon Fraser University, British Columbia, Canada
Title: Micromechanical  Resonators
Local Organizer:Â Iran Nanotechnology Initiative Council
Time: Saturday, August 13, 2016, 14:00- 16:00
Location: Conference Room, Iran Nanotechnology Initiative Council, Tehran, Iran
Abstract:
Microdevices employ a variety of transduction mechanisms to convert energy between different physical domains to each other. As such, fabrication techniques for micromachined devices are mainly optimized around a specific transduction mechanism. On the other hand, integration of multiple transducers on one chip can lead to significant reductions in cost, size, complexity, and power consumption of a sensory system while improving the performance, functionality, and reliability. A major hindrance to the integration of multiple sensors on one chip is the different, and often conflicting, fabrication requirements for devices that use different transduction mechanisms. To address this challenge, we employ resonance as the primary sensing technique for all sensors on the chip.
This talk demonstrates the application of resonance as the primary sensing mechanism in order to address the challenges in design and fabrication of multi-transducer systems. Examples of resonant transducers for sensing applications will be provided. It will be shown that significant enhancement in sensitivity is achievable through coupling of individual resonators. We finally demonstrate the merits of integrating microelectronic devices into the structure micromechanical devices for both sensing and actuation at micro- and nano-scales.